23 November 2009 Theoretical model and calibration experiment for BioCD
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Abstract
The theoretical model and calibration experiment of biological compact disc sensor (BioCD) is presented. BioCD is a new kind of label-free optical biosensor based on Interferometry to detect immobilized biomolecules with high speed, high sensitivity and high-throughput. Output signal theoretical expressions were deduced. The influences of illuminating beam Gauss parameter and lens aberration to detection sensitivity were simulated. Simulation result showed that Gauss parameter as well as aberration parameter increase will reduce detection sensitivity. Then BioCD experimental platform was setup, sensor arrays for calibration was fabricated using reactive ion etching technology on silicon substrate. Experimental results indicated that detection sensitivity can achieve 15mV/nm.
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Weili An, Feng Ying, Chen Han, "Theoretical model and calibration experiment for BioCD", Proc. SPIE 7508, 2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, 75080E (23 November 2009); doi: 10.1117/12.837980; https://doi.org/10.1117/12.837980
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