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23 November 2009 Design and modeling of a novel micro-displacement sensor based optical frequency comb
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Pumping a single-mode, tunable, external-cavity laser to excite the whispering gallery modes (WGM) of micro ring resonators (MRRs), a series of equidistant, wide free spectrum range (FSR) can be observed. Frequency shift of FSR can be used to feedback external changes, making MRR very promising in high-sensitivity sensing. In this paper, a novel displacement sensor composed of a micro ring resonator and a waveguide is presented and a designing route for this sensor is discussed. Based on mathematical analysis and the beam propagation methods (BPM), the major parameters including the geometry of MRR and micro cantilever are investigated in detail. Materials selection and fabrication method under current processing technic are also presented. For the typical structure in this paper, the final Q factor is estimated approximately 103 in theory at the wavelength of 1.5μm.Displacement alteration of cantilever is 0.296x10-6m - 0.535x10-5m approximately corresponding 10-8-10-6N force loading. The shift of transmission spectrum is about 3.9nm versus perimeter of MRR changing 1μm.
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Shubin Yan, Zhe Ji, Yingzhan Yan, Xiongying Ye, and Wendong Zhang "Design and modeling of a novel micro-displacement sensor based optical frequency comb", Proc. SPIE 7508, 2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, 75080G (23 November 2009);

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