Tunable RF MEMS capacitor for wireless communication

Xiuhan Li; Yu Xia; Jian Liu; Li Yin; Yu Liu; Dongming Fang; Haixia Zhang

doi:10.1117/12.845903

24 November 2009 Tunable RF MEMS capacitor for wireless communication

Xiuhan Li, Yu Xia, Jian Liu, Li Yin, Yu Liu, Dongming Fang, Haixia Zhang

Proceedings Volume 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications; 751002 (2009) https://doi.org/10.1117/12.845903
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

High quality tunable MEMS parallel plate capacitors have been widely used in phase shifters, oscillators and tunable filters for wireless communication. As electrostatic actuation and air dielectrics have led to devices with low power consumption and high quality factors, an electrostatically actuated MEMS tunable capacitor with two flexible plates have been designed and fabricated in this paper. According to the measurement results, tunable capacitor shows good performance in the frequency range of 2GHz-10GHz. The pull-in voltage for the capacitor is 13 V. The tuning ratio of the capacitor is very high, which can reach 320%.

Citation Download Citation

Xiuhan Li, Yu Xia, Jian Liu, Li Yin, Yu Liu, Dongming Fang, and Haixia Zhang "Tunable RF MEMS capacitor for wireless communication", Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 751002 (24 November 2009); https://doi.org/10.1117/12.845903

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