20 November 2009 Design and characterization of a gas actuated pump for µTAS
Author Affiliations +
Proceedings Volume 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications; 75100M (2009); doi: 10.1117/12.845914
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China
Abstract
We present the results on the design, simulation, fabrication, and characterization of a gas-actuated micro-jet pump for integrated micro-fluidic systems. Vacuum suction mode provided by the pump can effectively decrease the formation of air bubbles and overcome the interface tension between the liquid and the solid wall in the micro-fluidic systems. Structurally the pump, which can be fabricated with only one etching step, consists of a nozzle, a diffuser, two suction tubes, a throat pipe, and a suction chamber. To optimize the parameters for the future designs, various pump configurations with different geometries were simulated through FLUENT software firstly. Then, the characteristics of the gas-actuated micro-jet pumps were studied experimentally. The pump began to work at a pressure of 2kPa, and the actuation pressure could be easily realized through a medical syringe.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiuhan Li, Xiaomei Yu, "Design and characterization of a gas actuated pump for µTAS", Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 75100M (20 November 2009); doi: 10.1117/12.845914; https://doi.org/10.1117/12.845914
PROCEEDINGS
8 PAGES


SHARE
KEYWORDS
Throat

Diffusers

Microfluidics

Capillaries

Silicon

Deep reactive ion etching

Interfaces

Back to Top