20 November 2009 One-shot surface profile measurement using polarized phase-shifting
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Abstract
An instantaneous polarized phase-shifting interferometer (IPSI) with an optical image combiner is designed to form a one-shot surface profile measurement system. The interference images are captured simultaneously by using one CCD camera. Digital image correlation (DIC) method is applied effectively to correct the position mismatch among the images. Test of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.07μm~0.09μm can be achieved, and the maximum error is about 0.2μm.
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Yuan-Fang Chen, Yuan-Fang Chen, Yi-liang Du, Yi-liang Du, } "One-shot surface profile measurement using polarized phase-shifting", Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 751102 (20 November 2009); doi: 10.1117/12.836308; https://doi.org/10.1117/12.836308
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