20 November 2009 Design and simulation of comparative method for testing transverse thermal conductivity of SixNy thin film
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Abstract
A new structure of SixNy thin film transverse thermal conductivity measuring by comparative method is introduced. And by using finite element software ANSYS we emulated the effect to thermal distribution by the factors of heatpower, length & width of suspending beam, and the thermal conductivity. This method, with no limitation of measuring in vacuum, is simply structured and easily operated.
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Lixia Yang, Lixia Yang, Zhiming Wu, Zhiming Wu, Kai Yuan, Kai Yuan, Yadong Jiang, Yadong Jiang, } "Design and simulation of comparative method for testing transverse thermal conductivity of SixNy thin film", Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 751114 (20 November 2009); doi: 10.1117/12.837586; https://doi.org/10.1117/12.837586
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