Micro-structure imaging and measurement based on digital holographic system

Huaying Wang; Aili Qin; Baoqun Zhao

doi:10.1117/12.838004

24 November 2009 Micro-structure imaging and measurement based on digital holographic system

Huaying Wang; Aili Qin; Baoqun Zhao

Author Affiliations +

Proceedings Volume 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology; 75131Y (2009) https://doi.org/10.1117/12.838004
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

Based on the phase reconstruction method which is combined digital holography (DH) with digital lateral shearing interferometry (LSI) and the idea of the automatic aberration compensation (AAC), a method to eliminate the linear term of the sheared phase map is proposed. The procedures for reconstruction phase image using the LSI-DH method have been analyzed in detail, which indicates that one-dimensional phase unwrapping must be applied to the original phase map before lateral shearing. Moreover, the condition to obtain correct phase image is that the phase difference between the two adjacent pixels of the shearogram map is less than 2π. One of the prominent advantages of this method is that when the small amount of shearing is applied the two-dimensional phase unwrapping can be avoided. The computer simulations, which are based on the lensless Fourier transform holographic system, demonstrate the validity of the proposed method. It also indicates that the method has large tolerance to noise.

Citation Download Citation

Huaying Wang, Huaying Wang, Aili Qin, Aili Qin, Baoqun Zhao, Baoqun Zhao, } "Micro-structure imaging and measurement based on digital holographic system", Proc. SPIE 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology, 75131Y (24 November 2009); doi: 10.1117/12.838004; https://doi.org/10.1117/12.838004

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