28 October 2009 Fabrication of nano-Bragg polymer waveguide by soft-lithography process
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Abstract
A polymer waveguide is successfully fabricated by a new method, which is implemented by a Micro-Electro-Mechanical System (MEMS) process including a stamping transfer technique incorporated with holographic interference, a lithography procedure and soft molding tecnnology. The polymers used in these experiments are OG146 and OG154 with different refractive indices. The near-field measurement for the channel waveguide has shown that the polarization dependent loss is very low. This process is simple, easy and suitable for mass production.
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Jau-Kun Kuo, Jau-Kun Kuo, Wen-Chung Chang, Wen-Chung Chang, Kao-Feng Yarn, Kao-Feng Yarn, Wei-Ching Chuang, Wei-Ching Chuang, } "Fabrication of nano-Bragg polymer waveguide by soft-lithography process", Proc. SPIE 7514, Photonics and Optoelectronics Meetings (POEM) 2009: Fiber Optic Communication and Sensors, 75140J (28 October 2009); doi: 10.1117/12.843178; https://doi.org/10.1117/12.843178
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