27 October 2009 High efficiency Silicon-on-Insulator grating coupler between submicron waveguides and fibers
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Proceedings Volume 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration; 75160A (2009); doi: 10.1117/12.843423
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China
Abstract
A high efficiency Silicon-on-Insulator (SOI) grating coupler between submicron waveguides and fibers was designed and fabricated. The experimental study showed that a maximum coupling efficiency of 38% and 3dB bandwidth of larger than 40 nm at each end of a waveguide is achievable in a fiber in- fiber out setup.
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Yu Zhu, Zhiyong Li, Weihua Han, Zhongchao Fan, Yude Yu, Jinzhong Yu, "High efficiency Silicon-on-Insulator grating coupler between submicron waveguides and fibers", Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160A (27 October 2009); doi: 10.1117/12.843423; https://doi.org/10.1117/12.843423
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KEYWORDS
Waveguides

Silicon

Optical fibers

Diffraction gratings

Etching

Optical design

Scanning electron microscopy

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