Optical properties of amorphous Ba0.7Sr0.3TiO3 thin films obtained by metal organic decomposition technique

Fei Qiu; Zhimou Xu

doi:10.1117/12.843420

26 October 2009 Optical properties of amorphous Ba_0.7Sr_0.3TiO₃ thin films obtained by metal organic decomposition technique

Fei Qiu, Zhimou Xu

Author Affiliations +

Proceedings Volume 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration; 75160E (2009) https://doi.org/10.1117/12.843420
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

In this study, the amorphous Ba_0.7Sr_0.3TiO₃ (BST0.7) thin films were grown onto fused quartz and silicon substrates at low temperature by using a metal organic decomposition (MOD)-spin-coating procedure. The optical transmittance spectrum of amorphous BST0.7 thin films on fused quartz substrates has been recorded in the wavelength range 190~900 nm. The films were highly transparent for wavelengths longer than 330 nm; the transmission drops rapidly at 330 nm, and the cutoff wavelength occurs at about 260 nm. In addition, we also report the amorphous BST0.7 thin film groove-buried type waveguides with 90° bent structure fabricated on Si substrates with 1.65 μm thick SiO₂ thermal oxide layer. The design, fabrication and optical losses of amorphous BST0.7 optical waveguides were presented. The amorphous BST0.7 thin films were grown onto the SiO₂/Si substrates by using a metal organic decomposition (MOD)-spin-coating procedure. The optical propagation losses were about 12.8 and 9.4 dB/cm respectively for the 5 and 10 μm wide waveguides at the wavelength of 632.8 nm. The 90° bent structures with a small curvature of micrometers were designed on the basis of a double corner mirror structure. The bend losses were about 1.2 and 0.9 dB respectively for 5 and 10 μm wide waveguides at the wavelength of 632.8 nm. It is expected for amorphous BST0.7 thin films to be used not only in the passive optical interconnection in monolithic OEICs but also in active waveguide devices on the Si chip.

Citation Download Citation

Fei Qiu and Zhimou Xu "Optical properties of amorphous Ba_0.7Sr_0.3TiO₃ thin films obtained by metal organic decomposition technique", Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160E (26 October 2009); https://doi.org/10.1117/12.843420

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