Periodical polymer grating structure with high aspect ratio

Jau-Kun Kuo; Wen-Chung Chang; Kao-Feng Yarn; Wei-Ching Chuang

doi:10.1117/12.843466

26 October 2009 Periodical polymer grating structure with high aspect ratio

Jau-Kun Kuo, Wen-Chung Chang, Kao-Feng Yarn, Wei-Ching Chuang

Proceedings Volume 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration; 75160J (2009) https://doi.org/10.1117/12.843466
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

A new procedure for fabricating a periodic structure on a UV polymer at submicron range using holographic interferometry and molding processes is described. First, holographic interference using a He-Cd (325 nm) laser was used to create the master of the periodic line structure on an i-line sub-micron positive photoresist film. A 200 nm nickel thin film was then sputtered onto the positive photoresist. Final line pattern on a UV polymer was formed from casting against the master mold. Initial results show the technique can accurately control the grating's period and depth. A high aspect ratio of grating period (gp) to depth (d) is about 1.35.

Citation Download Citation

Jau-Kun Kuo, Wen-Chung Chang, Kao-Feng Yarn, and Wei-Ching Chuang "Periodical polymer grating structure with high aspect ratio", Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160J (26 October 2009); https://doi.org/10.1117/12.843466

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available