26 October 2009 SOI based waveguide devices
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Abstract
SOI based waveguide devices are becoming more and more active. The main results of the devices investigated in our team are presented in the paper. Photonic crystal with sharp bends was made and its excess loss is 1.1±0.4dB per mirror. Two kinds of couplers, slot coupler and grating coupler, were successfully fabricated. Coupling loss of the slot coupler is < 3dB between sub-micron optical waveguides and micronscale optical fibers. A coupling efficiency of 40.7% and 3-dB bandwidth of > 40nm of the grating coupler are obtained. Microring and microdisk resonators were simulated and optimized. Their Q factors and extinction ratios are 5.3×104, 14dB, and 2.8×105, 10dB, respectively. SOI PIN diode electro-optical switches with microring, microdisk and MZI were developed. Rise and fall time is 0.37 ns and 2.57 ns, respectively, for a microdisk optical switch.
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Jinzhong Yu, QingZhong Huang, Xuejun Xu, Xi Xiao, Yu Zhu, Yan Liu, Zhiyong Li, Yuntao Li, Zhongchao Fan, Yude Yu, "SOI based waveguide devices", Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160R (26 October 2009); doi: 10.1117/12.843338; https://doi.org/10.1117/12.843338
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