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12 October 2009 Research on transparent conductive AZO film fabricated by PECVD method
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Abstract
In this paper, AZO (ZnO:Al) polycrystalline thin films is produced with strong adhesion to the substrate, which deposit on the glass substrate by PECVD (plasma enhanced chemical vapor deposition) method. The film with the sheet resistance as low as 89Ω/(see manuscript), and with transmittance as high as 85% in visible light spans has been obtain. The measurements of the film structure and the experiments to examine the influence of the film electro-optical property have been shown. This AZO film fabricated by PECVD method is a useful attempt, and the results are very important to the choice of actual process of the solar cell.
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Zhaoquan Chen, Minghai Liu, Yuping Liu, Peng Hu, Liang Tang, and Xiwei Hu "Research on transparent conductive AZO film fabricated by PECVD method", Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 75180X (12 October 2009); https://doi.org/10.1117/12.839857
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