In-situ monitoring and control of photoresist parameters during thermal processing in the lithography sequence

Xiaodong Wu; Geng Yang; Ee-Xuan Lim; Arthur Tay

doi:10.1117/12.847879

14 December 2009 In-situ monitoring and control of photoresist parameters during thermal processing in the lithography sequence

Xiaodong Wu, Geng Yang, Ee-Xuan Lim, Arthur Tay

Author Affiliations +

Proceedings Volume 7520, Lithography Asia 2009; 752035 (2009) https://doi.org/10.1117/12.847879
Event: SPIE Lithography Asia, 2009, Taipei, Taiwan

Abstract

The rapid transition to smaller microelectronic feature sizes involves the introduction of new lithography technologies, new photoresist materials, and tighter processes specifications. This transition has become increasingly difficult and costly. The application of advanced computational and control methodologies have seen increasing utilization in recent years to improve yields, throughput, and, in some cases, to enable the actual process to print smaller devices. In this work, we demonstrate recent advances in real-time monitoring and control of these photoresist parameters with the use of innovative technologies, control and signal processing techniques; and integrated metrology to improve the performance of the various photoresist processing steps in the lithography sequence.

Citation Download Citation

Xiaodong Wu, Geng Yang, Ee-Xuan Lim, and Arthur Tay "In-situ monitoring and control of photoresist parameters during thermal processing in the lithography sequence", Proc. SPIE 7520, Lithography Asia 2009, 752035 (14 December 2009); https://doi.org/10.1117/12.847879

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available