PROCEEDINGS VOLUME 7521
INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2009 | 5-9 OCTOBER 2009
International Conference on Micro- and Nano-Electronics 2009
Editor(s): Kamil A. Valiev, Alexander A. Orlikovsky
Editor Affiliations +
INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2009
5-9 October 2009
Zvenigorod, Russian Federation
Front Matter: Volume 7521
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752101 (2010) https://doi.org/10.1117/12.855024
Advanced Lithography
T. Vandeweyer, J. Bekaert, M. Ercken, R. Gronheid, A. Miller, V. Truffert, S. Verhaegen, J. Versluijs, V. Wiaux, et al.
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752102 (2010) https://doi.org/10.1117/12.854658
Tariel M. Makhviladze, Mikhail E. Sarychev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752103 (2010) https://doi.org/10.1117/12.853420
N. I. Chkhalo, A. E. Pestov, N. N. Salashchenko, M. N. Toropov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752104 (2010) https://doi.org/10.1117/12.854325
N. I. Chkhalo, S. A. Gusev, M. N. Drozdov, E. B. Kluenkov, A. Ya. Lopatin, V. I. Luchin, A. E. Pestov, N. N. Salashchenko, L. A. Shmaenok, et al.
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752105 (2010) https://doi.org/10.1117/12.854728
Plasma Physics and Processing
J.-F. de Marneffe, F. Lazzarino, D. Goossens, Th. Conard, I. Hoflijk, D. Shamiryan, H. Struyf, W. Boullart
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752106 (2010) https://doi.org/10.1117/12.854680
E. Smirnov, A. K. Ferchichi, C. Huffman, M. R. Baklanov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752107 (2010) https://doi.org/10.1117/12.854882
A. Smirnov, A. Efremov, V. Svettsov, A. Islyaykin
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752108 (2010) https://doi.org/10.1117/12.853343
V. P. Kudrya
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752109 (2010) https://doi.org/10.1117/12.853289
Andrey V. Miakonkikh, Konstantin V. Rudenko
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210A (2010) https://doi.org/10.1117/12.853840
A. I. Vinogradov, N. M. Zarjankin, J. A. Mihajlov, E. P. Prokopev, S. P. Timoshenkov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210B (2010) https://doi.org/10.1117/12.853837
Structures for Photonics and Optoelectronics
A. A. Shklyaev, A. B. Latyshev, M. Ichikawa
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210C (2010) https://doi.org/10.1117/12.853670
V. Emelyanov, N. Kaluzhniy, S. Mintairov, M. Shvarts, V. Lantratov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210D (2010) https://doi.org/10.1117/12.853750
I. Semenikhin, K. A. Chao, A. Zakharova
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210E (2010) https://doi.org/10.1117/12.853906
A. Gelman, V. Mironov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210F (2010) https://doi.org/10.1117/12.854051
Sergey A. Dyakov, Vladimir A. Tolmachev, Ekaterina V. Astrova, Sergey G. Tikhodeev, Viktor Yu. Timoshenko, Tatiana S. Perova
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210G (2010) https://doi.org/10.1117/12.862566
Thin Films
Yuriy V, Moskalev, Sergey B. Moskovskii
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210H (2010) https://doi.org/10.1117/12.853554
V. Kagadei, E. Erofeev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210I (2010) https://doi.org/10.1117/12.853581
I. A. Khorin, Yu. I. Denisenko, V. N. Gusev, A. A. Orlikovsky, A. E. Rogozhin, V. I. Rudakov, A. G. Vasiliev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210J (2010) https://doi.org/10.1117/12.854340
E. Erofeev, V. Kagadei
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210K (2010) https://doi.org/10.1117/12.853639
A. E. Rogozhin, I. A. Khorin, V. V. Naumov, A. A. Orlikovsky, V. V. Ovcharov, V. I. Rudakov, A. G. Vasiliev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210L (2010) https://doi.org/10.1117/12.854302
Superconducting and Magnetic Structures
I. A. Devyatov, M. Yu. Kupriyanov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210M (2010) https://doi.org/10.1117/12.854393
I. A Devyatov, M. Yu. Romashka, A. V. Semenov, P. A. Krutitskii, M. Yu. Kupriyanov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210N (2010) https://doi.org/10.1117/12.854521
Alexander N. Ionov, Rolf R. Rentzsch
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210O (2010) https://doi.org/10.1117/12.854650
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210P (2010) https://doi.org/10.1117/12.854226
V. I. Bachurin, I. N. Zakharova, M. A. Shipilin, A. M. Shipilin
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210Q (2010) https://doi.org/10.1117/12.854768
A. I. Rykova, V. M. Dmitriev, E. N. Khatsko, A. V. Terekhov, A. S. Cherny, D. S. Kondrashev, T. Mydlarz, A. Zaleski, A. D. Shevshenko, et al.
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210R (2010) https://doi.org/10.1117/12.854579
Physics of Nanostructures
Dmitry Pozdnyakov, Andrei Borzdov, Vladimir Borzdov, Vladimir Labunov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210S (2010) https://doi.org/10.1117/12.853655
Y. S. Gerasimov, V. V. Shorokhov, E. S. Soldatov, O. V. Snigirev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210U (2010) https://doi.org/10.1117/12.854036
V. A. Malinin, V. V. Shorokhov, E. S. Soldatov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210V (2010) https://doi.org/10.1117/12.854688
A. Zakharova, K. A. Chao, Igor Semenikhin
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210W (2010) https://doi.org/10.1117/12.853748
Nanostructures Fabrication Techniques
Vladimir A.. Volodin, Taisiya T. Korchagina, Gennadiy N. Kamaev, Aleksandr Kh. Antonenko, Jurgen Koch, Boris N. Chichkov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210X (2010) https://doi.org/10.1117/12.853385
D. G. Gromov, S. A. Gavrilov, S. V. Dubkov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210Y (2010) https://doi.org/10.1117/12.854748
Ye. Yu. Alekseeva, E. A. Il'ichev, V. N. Inkin, D. M. Migunov, G. N. Petruhin, E. A. Poltoratskii, G. S. Rychkov, D. V. Shkodin
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75210Z (2010) https://doi.org/10.1117/12.855453
I. V. Sapkov, V. V. Kolesov, E. S. Soldatov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752110 (2010) https://doi.org/10.1117/12.854016
S. A. Evlashin, V. A. Krivchenko, P. V. Pastchenko, A. T. Rakhimov, N. V. Suetin, M. A. Timofeyev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752111 (2010) https://doi.org/10.1117/12.854206
A. S. Stepanov, E. S. Soldatov, O. V. Snigirev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752112 (2010) https://doi.org/10.1117/12.854681
A. N. Kuturov, E. S. Soldatov, L. A. Polyakova, S. P. Gubin
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752113 (2010) https://doi.org/10.1117/12.855194
Micro- and Nanostructures Characterization
Sergey P. Zimin, Vladimir M. Vasin, Egor S. Gorlachev, Anatoly P. Petrakov, Sergey V. Shilov
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752114 (2010) https://doi.org/10.1117/12.853728
Pavel G Medvedev, Mikhail A. Chuev, Mikhail V. Kovalchuk, Elhan M. Pashaev, Ilia A. Subbotin, Sergey N. Yakunin
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752115 (2010) https://doi.org/10.1117/12.854221
M. N Filippov, Yu. A. Novikov, A. V. Rakov, P. A. Todua
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752116 (2010) https://doi.org/10.1117/12.854696
Devices and ICs
Tariel M. Makhviladze, Mikhail E. Sarychev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752117 (2010) https://doi.org/10.1117/12.853391
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752118 (2010) https://doi.org/10.1117/12.853709
A. P. Chernyaev, V. A. Dravin, A. Yu. Golovanov, A. L. Karuzskii, A. E. Krapivka, A. N. Lykov, V. N. Murzin, A. V. Perestoronin, A. M. Tskhovrebov, et al.
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 752119 (2010) https://doi.org/10.1117/12.854461
Simulation and Modeling
Tariel M. Makhviladze, Airat Kh. Minushev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75211A (2010) https://doi.org/10.1117/12.853400
Robert V. Goldstein, Tariel M. Makhviladze, Mikhail E Sarychev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75211B (2010) https://doi.org/10.1117/12.853428
Ilia M Alekseev, Tariel M. Makhviladze, Airat Kh. Minushev, Mikhail E. Sarychev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75211C (2010) https://doi.org/10.1117/12.853475
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75211D (2010) https://doi.org/10.1117/12.853230
I. I. Abramov, A. L. Baranoff, I. A. Goncharenko, N. V. Kolomejtseva, Y. L. Bely, I. Y. Shcherbakova
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75211E (2010) https://doi.org/10.1117/12.853521
M. S. Gorbunov, G. I. Zebrev, P. N. Osipenko
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75211F (2010) https://doi.org/10.1117/12.853580
A. V. Degtyarev, V. P. Kudrya, Yu. P. Maishev
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75211G (2010) https://doi.org/10.1117/12.853774
Valentin O. Turin, Alexander V. Sedov, Gennady I. Zebrev, Benjamin Iñiguez, Michael S. Shur
Proceedings Volume International Conference on Micro- and Nano-Electronics 2009, 75211H (2010) https://doi.org/10.1117/12.853740
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