14 April 2010 Fabrication of micro metallic valve and pump
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Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 75221R (2010) https://doi.org/10.1117/12.854716
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore
Fabrication of micro devices by using micro metal forming was proposed by the authors. We developed a desktop servo-press machine with precise tooling system. Precise press forming processes including micro forging and micro joining has been carried out in a progressive die. In this study, micro metallic valve and pump were fabricated by using the precise press forming. The components are made of sheet metals, and assembled in to a unit in the progressive die. A micro check-valve with a diameter of 3mm and a length of 3.2mm was fabricated, and the property of flow resistance was evaluated. The results show that the check valve has high property of leakage proof. Since the valve is a unit parts with dimensions of several millimeters, it has advantage to be adapted to various pump design. Here, two kinds of micro pumps with the check-valves were fabricated. One is diaphragm pump actuated by vibration of the diaphragm, and another is tube-shaped pump actuated by resonation. The flow quantities of the pumps were evaluated and the results show that both of the pumps have high pumping performance.
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Ming Yang, Ming Yang, Yasunari Kabasawa, Yasunari Kabasawa, Kuniyoshi Ito, Kuniyoshi Ito, } "Fabrication of micro metallic valve and pump", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75221R (14 April 2010); doi: 10.1117/12.854716; https://doi.org/10.1117/12.854716

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