14 April 2010 Fabrication of micro metallic valve and pump
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Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 75221R (2010) https://doi.org/10.1117/12.854716
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore
Fabrication of micro devices by using micro metal forming was proposed by the authors. We developed a desktop servo-press machine with precise tooling system. Precise press forming processes including micro forging and micro joining has been carried out in a progressive die. In this study, micro metallic valve and pump were fabricated by using the precise press forming. The components are made of sheet metals, and assembled in to a unit in the progressive die. A micro check-valve with a diameter of 3mm and a length of 3.2mm was fabricated, and the property of flow resistance was evaluated. The results show that the check valve has high property of leakage proof. Since the valve is a unit parts with dimensions of several millimeters, it has advantage to be adapted to various pump design. Here, two kinds of micro pumps with the check-valves were fabricated. One is diaphragm pump actuated by vibration of the diaphragm, and another is tube-shaped pump actuated by resonation. The flow quantities of the pumps were evaluated and the results show that both of the pumps have high pumping performance.
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Ming Yang, Ming Yang, Yasunari Kabasawa, Yasunari Kabasawa, Kuniyoshi Ito, Kuniyoshi Ito, "Fabrication of micro metallic valve and pump", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75221R (14 April 2010); doi: 10.1117/12.854716; https://doi.org/10.1117/12.854716

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