Comparative study of residual stress measurement techniques with high spatial resolution

Dietmar Vogel; Ingrid Maus; Florian Schindler-Saefkow; Bernd Michel

doi:10.1117/12.851853

14 April 2010 Comparative study of residual stress measurement techniques with high spatial resolution

Dietmar Vogel, Ingrid Maus, Florian Schindler-Saefkow, Bernd Michel

Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 752224 (2010) https://doi.org/10.1117/12.851853
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore

Abstract

Three different methods of stress measurement with strong spatial resolution are presented. They base on stress relief techniques caused by focused ion beam milling, on altered electron backscattering by deformed lattices and on Stokes line shift measurements by Raman spectroscopy. The capability of these methods is demonstrated by their application to typical MEMS structures. A comparison between the methods is performed in order to outline potentials and limitations.

Citation Download Citation

Dietmar Vogel, Ingrid Maus, Florian Schindler-Saefkow, and Bernd Michel "Comparative study of residual stress measurement techniques with high spatial resolution", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 752224 (14 April 2010); https://doi.org/10.1117/12.851853

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