Thin film thickness and refractive index measurement by multiple beam interferometry

T. Y. Chen; Y. J. Lin; S. G. Hu; S. L. Yang; J. C. Chung

doi:10.1117/12.854796

14 April 2010 Thin film thickness and refractive index measurement by multiple beam interferometry

T. Y. Chen, Y. J. Lin, S. G. Hu, S. L. Yang, J. C. Chung

Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 75224S (2010) https://doi.org/10.1117/12.854796
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore

Abstract

The materials will show remarkable different characteristics and phenomenon in the nano-scale. It has become unlackable to build and use precise measurement technologies and systems to understand and control the material characteristics. In this paper, a primary surface force apparatus to measure the thickness and refractive index of thin film is developed based on the multiple beam interferometriy. Using the symmetrical three-layer formula from Israelachvili, a software is designed to analyze the Fringe of Equal Chromatic Order (FECO) produced from multiple beam interferometry. Test of the system on the the experimental FECO is shown. The applicability of the system is validated. Further discussion of the factors that affect the formation of FECO is given.

Citation Download Citation

T. Y. Chen, Y. J. Lin, S. G. Hu, S. L. Yang, and J. C. Chung "Thin film thickness and refractive index measurement by multiple beam interferometry", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75224S (14 April 2010); https://doi.org/10.1117/12.854796

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