Thickness and roughness measurement using a reflective digital holographic microscope

Majinyang Song; Constance Kang Ting Teoh; Ruojun Ding

doi:10.1117/12.851469

14 April 2010 Thickness and roughness measurement using a reflective digital holographic microscope

Majinyang Song, Constance Kang Ting Teoh, Ruojun Ding

Author Affiliations +

Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 752267 (2010) https://doi.org/10.1117/12.851469
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore

Abstract

Digital Holography is a new technology that promises many applications in diverse areas. Using numerical reconstruction of digitally recorded hologram, the Reflection Digital Holographic Microscope (DHM) provides the intensity, phase images which give the 3D depth profile of micro-devices. These essential data provided by digital holography are very useful for new MEMS design and fabrication as well as thin film growth. Having advantages over other existing measurement methods, it can possibly serve as an easier alternative in future. In this study, we further investigate the accuracy and specifications of thickness measurement, topography and roughness analysis using the DHM. By comparing the DHM results with alpha-stepper (a form of stylus probing) and Atomic Force Microscope (AFM), we find that the accuracy of the DHM for thickness measurement and roughness analysis is about 10%. The thickness and roughness range is also found to be 50nm to 500nm. Our experimental study hence demonstrates that digital holography has the potential to be developed into a suitable tool for thickness measurement and roughness analysis due to it being non-invasive and being able to provide quick time and relatively accurate measurements.

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Majinyang Song, Constance Kang Ting Teoh, and Ruojun Ding "Thickness and roughness measurement using a reflective digital holographic microscope", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 752267 (14 April 2010); https://doi.org/10.1117/12.851469

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