14 April 2010 Development of hybrid four-point bending test for determining mechanical properties of thin films using finite element method and response surface method
Author Affiliations +
Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 75226N (2010) https://doi.org/10.1117/12.851661
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore
Abstract
In this study, a hybrid four-point bending test method using the response surface method and the finite element analysis is proposed for determining the mechanical properties of thin films. The proposed method has two advantages: (1) it results in improved measurement accuracy because calculations are performed under conditions that are similar to the experimental conditions and take into account the contact phenomenon between the specimen and a load applicator; and (2) the method can be used to calculate not only the Young's modulus but also the Poisson's ratio. To evaluate the proposed method, 1050 aluminum alloy and electroless Ni-P depositions were examined. The examination results show that it is possible to measure the Young's modulus and the Poisson's ratio of thin films with improved accuracy by simulating the actual experimental conditions into account as accurately as possible.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. Kinoshita, "Development of hybrid four-point bending test for determining mechanical properties of thin films using finite element method and response surface method", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75226N (14 April 2010); doi: 10.1117/12.851661; https://doi.org/10.1117/12.851661
PROCEEDINGS
10 PAGES


SHARE
Back to Top