Mueller Matrix Ellipsometry Revisited

Bernard W. Bell

doi:10.1117/12.939953

10 June 1987 Mueller Matrix Ellipsometry Revisited

Bernard W. Bell

Proceedings Volume 0753, Acousto-Optic, Electro-Optic, & Magneto-Optic Devices & Applications; (1987) https://doi.org/10.1117/12.939953
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

The object of ellipsometry is to determine the complex ratio ρ (ρ=tanifi exp(i&) ) of the reflected or transmitted polarization state parameters. Ellipsometry has traditionally been used as a tool for measuring the optical constants (n,k) of a surface, or when given the optical constants of the substrate, to determine some property such as the thickness of a thin film. The operation of a Photo Elastic Modulator (PEM) type ellipsometer is described in Mueller matrix terms. The phase shift (6) between orthogonal polarization components and the relative amplitude ratio (tan b) is contained in the Mueller matrix elements and can be obtained via combinations of measlired matrix elements using no mechanical motion. Polarization modulation ellipsometry offers a fast automatic means for obtaining the Mueller matrix for an optical component or system. A computer controlled implementation is described along with simple algorithms to extract the ellipsometric constants. Experimental results for a low phase shift "standard" reflector are given.

Citation Download Citation

Bernard W. Bell "Mueller Matrix Ellipsometry Revisited", Proc. SPIE 0753, Acousto-Optic, Electro-Optic, & Magneto-Optic Devices & Applications, (10 June 1987); https://doi.org/10.1117/12.939953

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available