28 December 2010 Edge profile measurement of micro-cutting tools on a diamond turning machine
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Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75440J (2010) https://doi.org/10.1117/12.885660
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
Single crystal diamond micro-cutting tools, which are used for fabrication of precision micro-parts, have very sharp tool edges with radii in the range of tens of nanometers or even nanometers. Although there are many types of tools, the tools with a rounded nose are treated in this paper. They can be used for fabrication of very smooth and accurate surface with 3D micro structures such as micro-lens arrays, diffractive optical elements and so on. The machined quality is highly depending on the tool edges' states and it is desired to manage them. This paper presents a measuring instrument based on atomic force microscope (AFM), which is designed and constructed for on-machine measurement of the cutting edge profile. It is a combination of an AFM probe unit for 3D edge profile measurement and an alignment system with an optical sensor for aligning the probe-tip with the tool's edge top so that the measurement can be carried out in a short time. Measurement experiments of micro-tools with (nominal) nose radii of 8 μm and 0.2 mm are summarized to show the performance of the instrument. And the nose radii were evaluated as 7.2 μm and 0.188 mm, respectively.
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T. Asai, T. Asai, S. H. Jang, S. H. Jang, Y. Arai, Y. Arai, W. Gao, W. Gao, } "Edge profile measurement of micro-cutting tools on a diamond turning machine", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75440J (28 December 2010); doi: 10.1117/12.885660; https://doi.org/10.1117/12.885660
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