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28 December 2010 Polarization phase-shifting interference microscopy for ultra-precision surface topography
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Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75442H (2010) https://doi.org/10.1117/12.885971
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
Phase-shifting interference microscopy is a very important technique for precision surface topography measurement. In this paper, polarization phase-shifting interference microscopy is proposed for ultra-precision surface topography measurement. The principle of the microscopy is described and analyzed in details, a system based on the principle is constructed, and series of experimental testing are conducted on the system. The experimental results show that the measurement accuracy is better than 1.5nm, and high accuracy is verified.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. Cheng, X. Chen, L. Zhou, and X. Liu "Polarization phase-shifting interference microscopy for ultra-precision surface topography", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75442H (28 December 2010); https://doi.org/10.1117/12.885971
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