28 December 2010 White-light spectral scanning interferometry for surface measurement system
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Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75442N (2010) https://doi.org/10.1117/12.885436
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
The paper introduces the white-light spectral scanning interferometry for surface measurement. This interferometry can be used to measure the roughness of both smooth surfaces and those with large step heights. This real-time surface measurement can be achieved using acousto-optic tuneable filtering (AOTF) technique without mechanical scanning. At first, the structure and principle of this interferometry is introduced. Then the algorithm of the surface roughness measurement is proposed. What's more, the experiment with standard test piece is conducted. Compared with the traditional laser-light interferometry, the data shows that the proposed method has a higher accuracy which is proved to be nano-scale. A conclusion is given at last in which the superiorities and the limitations of the proposed system were discussed.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chenchen Wang, Nailiang Cao, Jin Lu, Jiayan Guan, "White-light spectral scanning interferometry for surface measurement system", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75442N (28 December 2010); doi: 10.1117/12.885436; https://doi.org/10.1117/12.885436
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