Design and realization of controllable measuring force profilometer

Wen Pan; Suping Chang

doi:10.1117/12.885978

31 December 2010 Design and realization of controllable measuring force profilometer

Wen Pan, Suping Chang

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75444K (2010) https://doi.org/10.1117/12.885978
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

In this paper the mechanical model of measuring rod of traditional stylus profilometer is established and the analysis results show that the measuring force is changed with rotation angle of the measuring rod. The impact on profile measurement of unsteady measuring force and the necessity of measuring surface of different materials with different constant measuring force are also discussed. The mechanical relations between the measuring rod and the surface are simplified by the structural change of measuring rod and a gravity center adjustment device. A voice coil motor (VCM) is added into the measuring system to control the measuring force. By adjusting the current in the coil of the VCM in real time, the measuring force can be controlled. With the controllable force, different workpieces can be measured by using different constant measuring force and the measurement results of different workpieces are given.

Citation Download Citation

Wen Pan and Suping Chang "Design and realization of controllable measuring force profilometer", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75444K (31 December 2010); https://doi.org/10.1117/12.885978

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