31 December 2010 Detection of positional precision of NC motorized stage based on photoelectric autocollimator
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Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75445J (2010); doi: 10.1117/12.885408
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
This paper presents a photoelectric autocollimator, which consists of an optical autocollimator and an area CCD and is calibrated using a dual-frequency laser interferometer HP5528A. The positional precision of a NC motorized stage is detected automatically and quickly by applying the photoelectric autocollimator calibrated and an optical polyhedron to finish the error compensation of the stage. According to GB/T 17421.2-2000, when the polyhedron and the stage both revolve with the same axis, the positional error of the stage is measured by the photoelectric autocollimator. Experimental results show that an angle can be measured by the photoelectric autocollimator whose standard deviation is less than 0.5" and the calculated position accuracy agrees with the specification of the stage.
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Bixi Yan, Qimeng Tan, Naiguang Lv, "Detection of positional precision of NC motorized stage based on photoelectric autocollimator", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75445J (31 December 2010); doi: 10.1117/12.885408; https://doi.org/10.1117/12.885408
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KEYWORDS
Autocollimators

Calibration

Reticles

Mirrors

Charge-coupled devices

Control systems

Interferometers

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