Paper
28 December 2010 Geometrical error correction research in high precision 2D laser measuring instrument
Author Affiliations +
Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75446O (2010) https://doi.org/10.1117/12.885566
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
A high precision 2-D laser measuring instrument is designed to meet the needs of high precision measurement. Through the error analysis of the measuring system, the geometrical errors show certain stability in the results. Geometrical correction methods are intensively researched. The angle between two axes of the measured plate and axes of the instrument produces deviations of coordinates X and Y of the points on the plate. Different coordinate systems are not roughly aligned. An inclined correction model is proposed to compensate the deviations and transform the coordinate systems. Then the perpendicular compensation model is proposed using the least square approximation method and the relationship between the coordinates X and Y. To reduce the effect of random error and other geometrical errors, a multi-position correction algorithm is presented through two different measuring positions. The measurement results verify that these methods and models are accurate and feasible.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiao-man Zhang and Zi Xue "Geometrical error correction research in high precision 2D laser measuring instrument", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75446O (28 December 2010); https://doi.org/10.1117/12.885566
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KEYWORDS
Error analysis

Systems modeling

Charge-coupled devices

Photomasks

Computing systems

Image processing

Data corrections

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