26 February 2010 High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
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Proceedings Volume 7569, Multiphoton Microscopy in the Biomedical Sciences X; 75691V (2010); doi: 10.1117/12.843160
Event: SPIE BiOS, 2010, San Francisco, California, United States
Abstract
Two-photon excitation microfabrication has been shown to be useful in the field of photonics and biomedicine. It generates 3D microstructures and provides sub-diffraction fabrication resolution. Nevertheless, laser direct writing, the most popular two-photon fabrication technique, has slow fabrication speed, and its applications are limited to prototyping. In this proceeding, we propose high-throughput 3D lithographic microfabrication system based on depthresolved wide-field illumination and build several 3D microstructures with SU-8. Through these fabrications, 3D lithographic microfabrication has scalable function and high-throughput capability. It also has the potential for fabricating 3D microstructure in biomedical applications, such as intertwining channels in 3D microfluidic devices for biomedical analysis and 3D cell patterning in the tissue scaffolds.
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Daekeun Kim, Peter T. C. So, "High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications", Proc. SPIE 7569, Multiphoton Microscopy in the Biomedical Sciences X, 75691V (26 February 2010); doi: 10.1117/12.843160; https://doi.org/10.1117/12.843160
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KEYWORDS
Microfabrication

Lithography

3D microstructuring

Biomedical optics

Photomasks

Fabrication

Microfluidics

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