18 February 2010 Far-UV solid state lasers for semiconductor processing
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Abstract
The wavelength region between 190 and 200 nm is especially relevant to semiconductor manufacturing. In contrast to ArF excimer lasers, frequency up-converted solid-state lasers offer tuning, coherence and beam quality characteristics that are essential to high performance semiconductor processing. This paper reviews various methodologies for implementing pulsed non-linear optical interactions in this wavelength region given a wide range of laser operating formats and describes the utilization of these sources for the specific semiconductor applications of interference lithography and photoresist materials studies.
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James Jacob, James Jacob, Darrell Armstrong, Darrell Armstrong, Arlee Smith, Arlee Smith, } "Far-UV solid state lasers for semiconductor processing", Proc. SPIE 7582, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications IX, 75820U (18 February 2010); doi: 10.1117/12.843849; https://doi.org/10.1117/12.843849
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