18 February 2010 Holographic femtosecond laser processing
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Abstract
Parallel femtosecond laser processing using a computer-generated hologram (CGH) displayed on a spatial light modulator, called holographic femtosecond laser processing, has advantages of high throughput and high light-use efficiency of the laser pulse energy. We demonstrate two types of the holographic femtosecond laser processing that are implemented with a Fourier transform CGH and a Fresnel transform CGH. We present some demonstrations of twodimensional and three-dimensional parallel laser processing.
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Yoshio Hayasaki, Yoshio Hayasaki, } "Holographic femtosecond laser processing", Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840E (18 February 2010); doi: 10.1117/12.840974; https://doi.org/10.1117/12.840974
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