17 February 2010 Individually controlled multi-focus laser processing for two-photon polymerization
Author Affiliations +
Abstract
A parallel processing of two-photon polymerization structuring is demonstrated with spatial light modulator. Spatial light modulator generates multi-focus spots on the sample surface via phase modulation technique controlled by computer generated hologram pattern. Each focus spot can be individually controlled in position and laser intensity with computer generated hologram pattern displayed on spatial light modulator. The multi-focus spots two-photon polymerization achieves the fabrication of asymmetric structure. Moreover, smooth sine curved polymerized line with amplitude of 5 μm and a period of 200 μm was obtained by fast switching of CGH pattern.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kotaro Obata, Kotaro Obata, Jürgen Koch, Jürgen Koch, Boris N. Chichkov, Boris N. Chichkov, } "Individually controlled multi-focus laser processing for two-photon polymerization", Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840L (17 February 2010); doi: 10.1117/12.842117; https://doi.org/10.1117/12.842117
PROCEEDINGS
6 PAGES


SHARE
Back to Top