17 February 2010 Laser texturing of doped borosilicate glasses
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Abstract
We describe a novel process of laser-assisted fabrication of surface structures on doped oxide glasses with heights reaching 10 - 13% of the glass thickness. This effect manifests itself as a swelling of the irradiated portion of the glass, and occurs in a wide range of glass compositions. The extent of such swelling depends on the glass base composition. Doping with Fe, Ti, Co, Ce, and other transition metals allows for adjusting the absorption of the glass and maximizing the feature size. In the case of bumps grown on borosilicate glasses, we observe reversible glass swelling and the bump height can increase or decrease depending on whether the consecutive laser pulse has higher or lower energy compared with the previous one. To understand the hypothetical mechanism, which includes laser heating of glass, glass melting, and directional flow, we explored density, refractive index, fictive temperature, and phase separation dynamics.
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Alexander Streltsov, Alexander Streltsov, James Dickinson, James Dickinson, Richard Grzybowski, Richard Grzybowski, Daniel Harvey, Daniel Harvey, Stephan Logunov, Stephan Logunov, Alper Ozturk, Alper Ozturk, James Sutherland, James Sutherland, Marcel Potuzak, Marcel Potuzak, } "Laser texturing of doped borosilicate glasses", Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840S (17 February 2010); doi: 10.1117/12.840689; https://doi.org/10.1117/12.840689
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