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A new type of cationically polymerizable organic-inorganic hybrid nanocomposite with micro-patternability and tailor
able thermomechanical properties has been developed[1]. The material has been built by co-condensation of 3-glycidyloxypropyl-triethoxysilane and phenyltriethoxysilane followed by subsequent mixing with oligomeric
cycloaliphatic epoxy resin as organic co-monomer. Nanocomposite mixtures have been formed by dispersing silica
nanoparticles with 15 nm particle size into the performed matrix sol. To achieve an almost homogeneous distribution of
the nanoparticles over the matrix different surface modifiers have been applied on the silica surface. The resulting
transparent mixtures have been applied on silicon substrates and have been UV-polymerized using a cationic
photoinitiator. The mechanical and thermomechanical properties as well as the resolution of photo patterns have been
followed in dependence of the nanoparticulate filler content and the type of surface modification. Photo patterns could be
created with high edge steepness even for highly filled systems. The universal hardness increased from 145 MPa for the
unfilled hybrid resin to 244 MPa for the system containing 30 wt.-% silica. The same nanocomposite system showed an
elastic modulus of about 5090 MPa compared to the unfilled hybrid resin of 3380 MPa which indicates the high potential
of these materials forming mechanically stable patterns.
Carsten Becker-Willinger,Pamela Kalmes,Petra Herbeck-Engel, andMichael Veith
"Micro-patternable hybrid nanocomposites with tailorable mechanical and thermomechanical properties", Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910G (16 February 2010); https://doi.org/10.1117/12.841668
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Carsten Becker-Willinger, Pamela Kalmes, Petra Herbeck-Engel, Michael Veith, "Micro-patternable hybrid nanocomposites with tailorable mechanical and thermomechanical properties," Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910G (16 February 2010); https://doi.org/10.1117/12.841668