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16 February 2010 Laser direct writing of submicron lines using micro- and nanofiber pens
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Abstract
In this paper, a novel direct writing technique using micro- and nanofiber pens is presented. The micro- and nanofiber pen serves as a tightly confined point source and it adopts micro touch mode in the process of writing. The energy distribution of direct writing model is analyzed by Three-Dimension Finite-Difference Time-Domain method. The lines with feature sizes down to 100 nm are experimentally achieved by this technique. Experiments also demonstrate that direct writing using micro- and nanofiber pens has some advantages: simple process, large writing area, and controllable width of lines. In addition, by altering writing direction of lines, complex submicron patterns can be fabricated.
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Feng Tian, Guoguang Yang, Jian Bai, Jianfeng Xu, and Qiaofen Zhou "Laser direct writing of submicron lines using micro- and nanofiber pens", Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910M (16 February 2010); https://doi.org/10.1117/12.840603
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