Translator Disclaimer
16 February 2010 Laser direct writing of submicron lines using micro- and nanofiber pens
Author Affiliations +
In this paper, a novel direct writing technique using micro- and nanofiber pens is presented. The micro- and nanofiber pen serves as a tightly confined point source and it adopts micro touch mode in the process of writing. The energy distribution of direct writing model is analyzed by Three-Dimension Finite-Difference Time-Domain method. The lines with feature sizes down to 100 nm are experimentally achieved by this technique. Experiments also demonstrate that direct writing using micro- and nanofiber pens has some advantages: simple process, large writing area, and controllable width of lines. In addition, by altering writing direction of lines, complex submicron patterns can be fabricated.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Feng Tian, Guoguang Yang, Jian Bai, Jianfeng Xu, and Qiaofen Zhou "Laser direct writing of submicron lines using micro- and nanofiber pens", Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910M (16 February 2010);

Back to Top