16 February 2010 Fabrication of corrugated long-period fiber gratings by wet bulk micromachining
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Abstract
This study presents a novel fabrication method of corrugated long-period fiber gratings (CLPFG). The chemical wet etching process is used to fabricate the CLPFG, and the patterned SU-8 50 photoresist is used as etch mask. Since the CLPFG fabricated by the novel method reduces the complication and cost, it is suitable for mass production. In this study, the period of the CLPFG is 690 μm and the resonant-attenuation wavelength is 1558 nm. The maximum resonance-attenuation of the CLPFG is 23 dB. Eventually, the CLPFG in this study has demonstrated a high temperature sensitivity (60 pm/ °C), wavelength-shifting linearity (R2=0.99), and 1°C of resolution.
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Chia-Chin Chiang, Liren Tsai, Hao-Jhen Chang, Chih-Lang Lin, Jin-Shun Kuo, "Fabrication of corrugated long-period fiber gratings by wet bulk micromachining", Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759110 (16 February 2010); doi: 10.1117/12.841217; https://doi.org/10.1117/12.841217
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