Low-cost system for testing MEMS for research and educational applications

Gabriel Ramirez; Ganapathy Sivakumar; Shelby Lacouture; Tim Dallas

doi:10.1117/12.842560

4 February 2010 Low-cost system for testing MEMS for research and educational applications

Gabriel Ramirez, Ganapathy Sivakumar, Shelby Lacouture, Tim Dallas

Proceedings Volume 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX; 75920M (2010) https://doi.org/10.1117/12.842560
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

General access to MEMS is hampered by the expense of probe stations. We report on the construction of a lowcost system for operating MEMS devices for research and education. The system includes a driver-board, packaged MEMS chip (48 pin DIP - optical), and LabView VI. Typically, 20-40 separate devices (electrothermal and electrostatic actuators, micromirrors, and micro-positioners) are fabricated within the standard SUMMiT chip footprint (6.3x2.8mm). Educators can use the system to carry out labs for a variety of education levels. Researchers can use the system for prototyping new devices, developing better models for computer simulations, and utilizing devices for new applications.

Citation Download Citation

Gabriel Ramirez, Ganapathy Sivakumar, Shelby Lacouture, and Tim Dallas "Low-cost system for testing MEMS for research and educational applications", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920M (4 February 2010); https://doi.org/10.1117/12.842560

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