4 February 2010 Low-cost system for testing MEMS for research and educational applications
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General access to MEMS is hampered by the expense of probe stations. We report on the construction of a lowcost system for operating MEMS devices for research and education. The system includes a driver-board, packaged MEMS chip (48 pin DIP - optical), and LabView VI. Typically, 20-40 separate devices (electrothermal and electrostatic actuators, micromirrors, and micro-positioners) are fabricated within the standard SUMMiT chip footprint (6.3x2.8mm). Educators can use the system to carry out labs for a variety of education levels. Researchers can use the system for prototyping new devices, developing better models for computer simulations, and utilizing devices for new applications.
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Gabriel Ramirez, Gabriel Ramirez, Ganapathy Sivakumar, Ganapathy Sivakumar, Shelby Lacouture, Shelby Lacouture, Tim Dallas, Tim Dallas, } "Low-cost system for testing MEMS for research and educational applications", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920M (4 February 2010); doi: 10.1117/12.842560; https://doi.org/10.1117/12.842560


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