Development and testing of a multi-level chevron actuator based positioning system

Sandesh Rawool; Ganapathy Sivakumar; Johan Hendriske; Daniel Buscarello; Immanuel Purushothaman; Tim E. Dallas

doi:10.1117/12.842270

17 February 2010 Development and testing of a multi-level chevron actuator based positioning system

Sandesh Rawool, Ganapathy Sivakumar, Johan Hendriske, Daniel Buscarello, Immanuel Purushothaman, Tim E. Dallas

Proceedings Volume 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX; 75920Q (2010) https://doi.org/10.1117/12.842270
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

We present the design, fabrication, and testing of a micro-scale positioning system. The SUMMiT V™ processed design allows an in-plane, bi-directional, micron-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the actuation. The design is intended to reduce the footprint and number of electrical connections needed, compared to similar devices. A LabVIEW based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ~180μm.

Citation Download Citation

Sandesh Rawool, Ganapathy Sivakumar, Johan Hendriske, Daniel Buscarello, Immanuel Purushothaman, and Tim E. Dallas "Development and testing of a multi-level chevron actuator based positioning system", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920Q (17 February 2010); https://doi.org/10.1117/12.842270

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