16 February 2010 Nonlinear mathematical model for a biaxial MOEMS scanning mirror
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Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940B (2010) https://doi.org/10.1117/12.843084
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
In this paper, a nonlinear mathematic model for Microvision's MOEMS scanning mirror is presented. The pixel placement accuracy requirement for scanned laser spot displays translates into a roughly 80dB signal to noise ratio, noise being a departure from the ideal trajectory. To provide a tool for understanding subtle nonidealities, a detailed nonlinear mathematical model is derived, using coefficients derived from physics, finite element analysis, and experiments. Twelve degrees of freedom parameterize the motion of a gimbal plate and a suspended micromirror; a thirteenth is the device temperature. Illustrations of the application of the model to capture subtleties about the device dynamics and transfer functions are presented.
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Yunfei Ma, Yunfei Ma, Wyatt O. Davis, Wyatt O. Davis, Matt Ellis, Matt Ellis, Dean Brown, Dean Brown, } "Nonlinear mathematical model for a biaxial MOEMS scanning mirror", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940B (16 February 2010); doi: 10.1117/12.843084; https://doi.org/10.1117/12.843084

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