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16 February 2010 Deformable silicon membrane for dynamic linear laser beam diffuser
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Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940F (2010)
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 20 kHz. Mode shapes of the deformable mirror are excited using magnetic actuation. Diffusing angle can be tuned by adjusting the driving current in the membrane. We measured a diffusing angle of 1° for an applied current of 40 mA. The aluminum coated mirror can handle 140 W/cm2 of visible to infrared optical power. Application to smooth out interference pattern generated by a static diffuser is shown.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Masson, A. Bich, H. P. Herzig, R. Bitterli, W. Noell, T. Scharf, R. Voelkel, K. J. Weible, and N. F. de Rooij "Deformable silicon membrane for dynamic linear laser beam diffuser", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940F (16 February 2010);


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