High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping

Stefan M. Weber; Wilfried Noell; Sébastien Lani; Fabio Jutzi; Peter Brühlmeier; Denis Kiselev; Jérôme Extermann; Luigi Bonacina; Jean-Pierre Wolf; Nico F. de Rooij

doi:10.1117/12.840847

16 February 2010 High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping

Stefan M. Weber, Wilfried Noell, Sébastien Lani, Fabio Jutzi, Peter Brühlmeier, Denis Kiselev, Jérôme Extermann, Luigi Bonacina, Jean-Pierre Wolf, Nico F. de Rooij

Author Affiliations +

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940J (2010) https://doi.org/10.1117/12.840847
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

We show the first results of a linear 100-micromirror array capable of modulating the phase and amplitude of the spectral components of femtosecond lasers. Using MEMS-based reflective systems has the advantage of utilizing coatings tailored to the laser wavelength range. The innovative features of our device include a novel rotational, vertical comb-drive actuator and an X-shaped, laterally reinforced spring that prevents lateral snap-in while providing flexibility in the two degrees of freedom of each mirror, namely piston and tilt. The packaging utilizes high-density fine-pitch wire-bonding for on-chip and chip-to-PCB connectivity. For the first deployment, UV-shaped pulses will be produced to coherently control the dynamics of biomolecules.

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Stefan M. Weber, Wilfried Noell, Sébastien Lani, Fabio Jutzi, Peter Brühlmeier, Denis Kiselev, Jérôme Extermann, Luigi Bonacina, Jean-Pierre Wolf, and Nico F. de Rooij "High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940J (16 February 2010); https://doi.org/10.1117/12.840847

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