17 February 2010 Prototyping of MWIR MEMS-based optical filter combined with HgCdTe detector
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Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940W (2010) https://doi.org/10.1117/12.842700
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
Abstract
In the past decades, there have been several attempts to create a tunable optical detector with operation in the infrared. The drive for creating such a filter is its wide range of applications, from passive night vision to biological and chemical sensors. Such a device would combine a tunable optical filter with a wide-range detector. In this work, we propose using a Fabry-Perot interferometer centered in the mid-wave infrared (MWIR) spectrum with an HgCdTe detector. Using a MEMS-based interferometer with an integrated Bragg stack will allow in-plane operation over a wide range. Because such devices have a tendency to warp, creating less-than-perfect optical surfaces, the Fabry-Perot interferometer is prototyped using the SOI-MUMPS process to ensure desirable operation. The mechanical design is aimed at optimal optical flatness of the moving membranes and a low operating voltage. The prototype is tested for these requirements. An HgCdTe detector provides greater performance than a pyroelectic detector used in some previous work, allowing for lower noise, greater detection speed and higher sensitivity. Both a custom HgCdTe detector and commercially available pyroelectric detector are tested with commercial optical filter. In previous work, monolithic integration of HgCdTe detectors with optical filters proved to be problematic. Part of this work investigates the best approach to combining these two components, either monolithically in HgCdTe or using a hybrid packaging approach where a silicon MEMS Fabry-Perot filter is bonded at low temperature to a HgCdTe detector.
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Dmitry A. Kozak, Bautista Fernandez, Silviu Velicu, Joel Kubby, "Prototyping of MWIR MEMS-based optical filter combined with HgCdTe detector", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940W (17 February 2010); doi: 10.1117/12.842700; https://doi.org/10.1117/12.842700
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