17 February 2010 Design of spectrometers and ended-ended systems
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Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 759411 (2010) https://doi.org/10.1117/12.847793
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
Abstract
Optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. The actuallity is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based optoelectrical microsystems on a single chip. This systems however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give high optimal optical performance. This work study the best characteristics of micromirrors fabricated with anisotropic etching and used in spectrophotometers and endedended systems. The trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.
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A. G. Rojas-Hernandez, A. G. Rojas-Hernandez, A. Vera-Marquina, A. Vera-Marquina, D. Berman-Mendoza, D. Berman-Mendoza, A. Garcia-Juarez, A. Garcia-Juarez, } "Design of spectrometers and ended-ended systems", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759411 (17 February 2010); doi: 10.1117/12.847793; https://doi.org/10.1117/12.847793
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