MEMS temperature scanner: principles, advances, and applications

Thomas Otto; Ray Saupe; Volker Stock; Thomas Gessner

doi:10.1117/12.848632

17 February 2010 MEMS temperature scanner: principles, advances, and applications

Thomas Otto, Ray Saupe, Volker Stock, Thomas Gessner

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 759412 (2010) https://doi.org/10.1117/12.848632
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Contactless measurement of temperatures has gained enormous significance in many application fields, ranging from climate protection over quality control to object recognition in public places or military objects. Thereby measurement of linear or spatially temperature distribution is often necessary. For this purposes mostly thermographic cameras or motor driven temperature scanners are used today. Both are relatively expensive and the motor drive devices are limited regarding to the scanning rate additionally. An economic alternative are temperature scanner devices based on micro mirrors. The micro mirror, attached in a simple optical setup, reflects the emitted radiation from the observed heat onto an adapted detector. A line scan of the target object is obtained by periodic deflection of the micro scanner. Planar temperature distribution will be achieved by perpendicularly moving the target object or the scanner device. Using Planck radiation law the temperature of the object is calculated. The device can be adapted to different temperature ranges and resolution by using different detectors - cooled or uncooled - and parameterized scanner parameters. With the basic configuration 40 spatially distributed measuring points can be determined with temperatures in a range from 350°C - 1000°C. The achieved miniaturization of such scanners permits the employment in complex plants with high building density or in direct proximity to the measuring point. The price advantage enables a lot of applications, especially new application in the low-price market segment This paper shows principle, setup and application of a temperature measurement system based on micro scanners working in the near infrared range. Packaging issues and measurement results will be discussed as well.

Citation Download Citation

Thomas Otto, Ray Saupe, Volker Stock, and Thomas Gessner "MEMS temperature scanner: principles, advances, and applications", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759412 (17 February 2010); https://doi.org/10.1117/12.848632

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KEYWORDS

Scanners

Temperature metrology

Mirrors

Micromirrors

Sensors

Black bodies

Microelectromechanical systems

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