18 February 2010 Shaping light: MOEMS deformable mirrors for microscopes and telescopes
Author Affiliations +
Proceedings Volume 7595, MEMS Adaptive Optics IV; 759502 (2010) https://doi.org/10.1117/12.848221
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
Abstract
Micromachined deformable mirrors (DMs) have enabled rapid advances in applications ranging from large telescope astronomy and free space laser communication to biological microscopy and retinal imaging over the past decade. In this talk I describe our efforts at Boston University and at Boston Micromachines Corporation to design, fabricate, and control MOEMS DMs for adaptive optics (AO) applications. Integration of the DMs in AO systems is described, along with results demonstrating unprecedented advances in resolution and contrast in microscopes and telescopes challenged by unavoidable wavefront aberrations. MEMS-DM research offers the rare opportunity to introduce technology that is both more economical and more capable than the state-of-the-art.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Bifano, "Shaping light: MOEMS deformable mirrors for microscopes and telescopes", Proc. SPIE 7595, MEMS Adaptive Optics IV, 759502 (18 February 2010); doi: 10.1117/12.848221; https://doi.org/10.1117/12.848221
PROCEEDINGS
8 PAGES


SHARE
Back to Top