18 February 2010 New results of unimorph laser mirrors with screen printed actuator
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Proceedings Volume 7595, MEMS Adaptive Optics IV; 75950J (2010) https://doi.org/10.1117/12.843810
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
Abstract
This paper reports on new results of the development of a unimorph laser beam shaping mirror based on Low Temperature Cofired Ceramics (LTCC). The deformable mirror is actuated by a side screen printed piezoceramic thick film based on lead zirconate titanate (PZT). The reflective surface is electroplated copper that is diamond machined to flatten the surface. We introduce the solder jet bumbing fixation technology to mount the deformable mirror into a metallic mounting. This assembling technology introduces very little energy input and thus also very little deformation into the mirror. The material of the mounting is CE7 that is especially thermal adapted to the deformable mirror. We will present results on deflection and resonance frequency for two different mirror designs.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Bruchmann, C. Bruchmann, T. Burkhardt, T. Burkhardt, A. Kamm, A. Kamm, Sylvia Gebhardt, Sylvia Gebhardt, Erik Beckert, Erik Beckert, Ramona Eberhardt, Ramona Eberhardt, Andreas Tünnermann, Andreas Tünnermann, } "New results of unimorph laser mirrors with screen printed actuator", Proc. SPIE 7595, MEMS Adaptive Optics IV, 75950J (18 February 2010); doi: 10.1117/12.843810; https://doi.org/10.1117/12.843810
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