DMD-based 3D micro-manufacturing

Jae-Won Choi; Michael D. Irwin; Ryan B. Wicker

doi:10.1117/12.846287

18 February 2010 DMD-based 3D micro-manufacturing

Jae-Won Choi, Michael D. Irwin, Ryan B. Wicker

Proceedings Volume 7596, Emerging Digital Micromirror Device Based Systems and Applications II; 75960H (2010) https://doi.org/10.1117/12.846287
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

The development of the Digital Micromirror Device (DMD) by Texas Instruments has made a significant breakthrough in 3D micro-manufacturing, and in particular, in the area of additive layer-based manufacturing. One area of particular interest for using DMD technology is microstereolithography; a technology that builds 3D shapes through successive photopolymerization of individual thin 2D layers that are stacked vertically. A DMD-based projection microstereolithography system and a robust micro-manufacturing process have been developed. This system and various micro-fabricated 3D structures with features on the order of 10 microns, including recent advancements in multimaterial micro-fabrication, will be presented and described.

Citation Download Citation

Jae-Won Choi, Michael D. Irwin, and Ryan B. Wicker "DMD-based 3D micro-manufacturing", Proc. SPIE 7596, Emerging Digital Micromirror Device Based Systems and Applications II, 75960H (18 February 2010); https://doi.org/10.1117/12.846287

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