Oxide thin film transistors on novel flexible substrates

S. J. Pearton; Wantae Lim; Erica Douglas; Fan Ren; Young Woo Heo; D. P. Norton

doi:10.1117/12.844935

15 February 2010 Oxide thin film transistors on novel flexible substrates

S. J. Pearton, Wantae Lim, Erica Douglas, Fan Ren, Young Woo Heo, D. P. Norton

Proceedings Volume 7603, Oxide-based Materials and Devices; 760315 (2010) https://doi.org/10.1117/12.844935
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

Enhancement-mode TFTs based on amorphous InGaZnO channel were fabricated on paper, glass or plastic substrates at low temperature (< 100°C). The TFTs operated in enhancement mode and showed low operating voltages of 0.5-2.5 V, drain current on-to-off ratios of ~ 10⁵, sub-threshold gate-voltage swing of 0.25-0.5 V.decade^-1, and high saturation mobilities of 5-12 cm².V^-1.s^-1. The devices exhibited small shifts during 1000 hours aging time at room temperature. Significant challenges remain, including improving the stability of the devices under bias, lowering the operating voltages, replacing metal contacts with conducting polymers that should be more resistant to cracking on rolling-up of flexible substrates and developing large-area printing processes that are compatible with manufacturing these devices on very large areas.

Citation Download Citation

S. J. Pearton, Wantae Lim, Erica Douglas, Fan Ren, Young Woo Heo, and D. P. Norton "Oxide thin film transistors on novel flexible substrates", Proc. SPIE 7603, Oxide-based Materials and Devices, 760315 (15 February 2010); https://doi.org/10.1117/12.844935

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available