15 February 2010 Nanopatterned optical and magnetic La0.7Sr0.3MnO3 arrays: synthesis, fabrication, and properties
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Proceedings Volume 7603, Oxide-based Materials and Devices; 76031H (2010) https://doi.org/10.1117/12.845257
Event: SPIE OPTO, 2010, San Francisco, California, United States
In the past few years, we have fabricated nanoscale La0.7Sr0.3MnO3 periodic arrays with unique optical and magnetic properties successfully. These periodic patterns were made by La0.7Sr0.3MnO3 resist that can be developed under a nontoxic and environmental friendly manner using pure water. The resist is also capable to exhibit both positive and negative resist behaviors depending on the electron beam dosage. Thus, these special characteristics are used to fabricate and tune periodic structure thin film having controlled optical reflectance properties in the wavelength of 300 nm to 800 nm with one fixed design electron beam pattern by simply changing the electron beam dosage only. Additionally, the magnetization of La0.7Sr0.3MnO3 patterns can be enhanced by post sintering the sample at 900 °C after electron beam irradiation. Therefore, our study provides a one-step, simple, and convenient alternative technique for the fabrication of tunable optical structure and nanoscale magnetic patterns, which form the building blocks for the study of optoelectronic and magnetic devices in nanoscale periodic arrays.
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Ming-Chung Wu, Ming-Chung Wu, Chih-Min Chuang, Chih-Min Chuang, Yu-Ching Huang, Yu-Ching Huang, Yi-Jen Wu, Yi-Jen Wu, Kuo-Chung Cheng, Kuo-Chung Cheng, Ching-Fuh Lin, Ching-Fuh Lin, Yang-Fang Chen, Yang-Fang Chen, Wei-Fang Su, Wei-Fang Su, } "Nanopatterned optical and magnetic La0.7Sr0.3MnO3 arrays: synthesis, fabrication, and properties", Proc. SPIE 7603, Oxide-based Materials and Devices, 76031H (15 February 2010); doi: 10.1117/12.845257; https://doi.org/10.1117/12.845257

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