11 February 2010 Microfluidics and thin-film processes: a recipe for organic integrated photonics based on 3D microresonators
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We report on the design and realization of photonic integrated devices based on 3D organic microresonators. This has been achieved by combining microfluidics techniques and thin-film processes. The microfluidic device and the control of the flow rates of the continuous and dispersed phases allow the fabrication of organic microresonators with diameter ranging from 30 to 200 μm. The resonance of the sphere in air has been first investigated by using the Raman spectroscopy set-up demonstrating the appropriate photonic properties. Then the microresonators have been integrated on an organic chip made of the photosensitive resin SU-8 and positioned at the extremity of a taper and alongside a rib waveguide. The realization of these structures by thin-film processes needs one step UV-lithography leading to 6μm width and 30μm height. Both devices have proved the efficient evanescent coupling leading to the excitation of the whispering gallery modes confined at the surface of the organic 3D microresonators. Finally, a band-stop filter has been used to detect the resonance spectra of the resonators once integrated.
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N. Huby, N. Huby, D. Pluchon, D. Pluchon, M. Belloul, M. Belloul, A. Moreac, A. Moreac, N. Coulon, N. Coulon, E. Gaviot, E. Gaviot, P. Panizza, P. Panizza, B. Bêche, B. Bêche, } "Microfluidics and thin-film processes: a recipe for organic integrated photonics based on 3D microresonators", Proc. SPIE 7604, Integrated Optics: Devices, Materials, and Technologies XIV, 760407 (11 February 2010); doi: 10.1117/12.836016; https://doi.org/10.1117/12.836016

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